STM Phaino : 研發奈米材料的顯微鏡

奈米級定位、變焦、量測樣品

影像處理與分析

Matrix and filters help to reveal the true surface for correct analysis, such as line profile, roughness, histogram, island counting and others.
Matrix and filters help to reveal the true surface for correct analysis, such as line profile, roughness, histogram, island counting and others.
Adjustable colour palette, light effects and view point help to construct an easy-to-understand 3D image.  (Example: diamond-like carbon coating, DLC 1.5 X 1.5 µm)
Adjustable colour palette, light effects and view point help to construct an easy-to-understand 3D image. (Example: diamond-like carbon coating, DLC 1.5 X 1.5 µm)

I-V 電性 & 奈米蝕刻

By sweeping voltage and measuring current at a specific location, STM obtains the I-V curve, which can be used to study the effect of different treatments.
By sweeping voltage and measuring current at a specific location, STM obtains the I-V curve, which can be used to study the effect of different treatments.
By applying bias or transporting materials between the tip and sample surface, STM can be used to manipulate molecules or even individual atoms.
By applying bias or transporting materials between the tip and sample surface, STM can be used to manipulate molecules or even individual atoms.

 

奈米定位 & 自動進針

高倍率數位顯微鏡可直接找到微米級目標結構進行掃描,再以奈米級的移動平台取得精準定位。大幅提昇奈米級分析與研發效率。
探針步進到樣品表面是自動化程序,也可透過軟體手動操作,做更快進針或是調整更適當的位置。

技術特長

  • 掃描穿隧顯微鏡 (Scanning tunnelling microscopy) 具有原子級的三維解析能力,也很適合觀測奈米級的材料結構。Nanovie STM Phaino 內載雙掃描頭,可隨時切換成大範圍或是高解析度掃描,無需手動安裝。

    High resolution scanner:
    • XY Range ≈ 0.8 μm
    • Z Range ≈ 0.8 μm
    • XY ≈ 1.6 μm (Extended Mode)
    Large range scanner:
    • XY Range ≈ 3.0 μm
    • Z Range ≈ 2.0 μm
    • XY ≈ 5.0 μm (Extended Mode)
     
    Optimal Physical Resolution:
    • XY Resolution ≈ 0.2 nm
    • Z Resolution ≈ 0.03 nm
    Standard Features:
    • Scan Mode: Constant Current
    • Spectroscopy Mode: Current Voltage (I-V)
    • Tip-to-sample Approach: Automatic
    • Image Size: 50 X 50 ~ 550 X 550 pts

    The above parameters may vary depending on calibration.

  • Nanovie STM Phaino 的奈米級移動平台,方便即時移動樣品至適當掃描位置,不需要手動或每次重新操作。搭配與針尖共焦距的高倍率數位顯微鏡,不論是掃描前、或是更換目標,都很容易找到微米級的目標物。.

    XY Motor Stage:
    • XY Travel : 2.0 mm
    • XY Step < 100 nm
    • Software Control
    CCD Camera:
    • Magnification : 800X (or better)
    • Resolution : 2 MP (or better)
    • Used for "Approaching" & "Positioning" Phase.
     
    High Resolution Scanner with Motor Stage:
    • XY Range ≈ 1.6 μm
    • Z Range ≈ 0.8 μm
    Large Range Scanner with Motor Stage:
    • XY Range ≈ 5.0 μm
    • Z Range ≈ 2.0 μm
  • 半導體已跨越 10 nm 製程的領域,探測此一維度的結構與電性愈來愈是重要。其中以 STM 能提供最精密的結構掃描,並能量測電性能譜、局部態密度與能帶隙。桌上型 STM 省去大型機台進超高真空的需求,能大幅提昇研究效能與彈性。

    Advanced Features:
    • Nano-Lithography
    • Instant Tip Restoration
    • Automatic Tip Approach
    Optional Features:
    • In-Liquid Scan
    • Scan Mode: Constant Height
    • Current-Imaging-Tunnelling Spectroscopy
    • Local Barrier Height Spectroscopy (dI/dV Curve)
    • Current-Distance Spectroscopy (I-Z Curve)
    • Dual Vibration Isolation Platform

     

    N-terface Pro : Professional Scan Controlling Interface
    • Friendly graphic interface
    • Real time imaging and parameter modifications
    • Control of the scanner, tip-approach, motor stage and camera
    • Demonstration modes for teaching and presentation
    N-mage : Professional Image Processing & Data Analysis
    • Visualise the true surface : De-slope, noise reduction, and other filters.
    • Enhance surface characteristics : 3D display with lighting effects, plus a variety of palettes available.
    • All-around analysis : Line profile, height histogram, roughness, size, angle, island number counting, 2D Fourier transform, et al.
  • Nanovie ATM 自動製針裝置可以小批量快速生產奈米級探針,供超高針空 STM、探針台、奈米機器使用。無需電腦、一鍵完成。針尖曲率半徑約 15 nm,確保優異可靠的掃描與操控能力。

    Automatic Tip Maker:
    • Tip Curvature Radius ~ 15 nm
    • 6 Tips / Batch (~ 15 minutes)
    • One push button. Computer not required.
  • Nanovie STM Phaino 是方便可靠的奈米表面分析儀器,可快速有效率的觀察物品的立體結構與電子能譜。配合進階的功能選項,可進行學術研究與產業應用。

    STM Main Body:

    • Dimension (mm): 220 (H) X 100 (∅) w/o Camera
    • Weight (kg): 3.1 kg

     

    Electronic Controller:

    • 16-bit A/D & D/A Converters
    • Power: 12V DC 1A (Input: 100-240V AC @ 50/60Hz)
    • Dimension (mm): 170 (W) X 145 (D) X 65 (H)
    • Weight (kg): 1.0 kg

     

    Sample Working Space:

    • Sample Size < 15 mm
    • Chamber Size: 45 mm (H) X 75 mm (∅)

     

    Accessories:

    • Magnetic Tip Holder & TungstenTips
    • Standard Samples (DVD, Blu-ray Disc, Oxidised HOPG, etc)
    • Liquid Cell & Insulated Tips (Optional, for in-liquid scans)
    • Dual Vibration Isolation Platform (Optional, for better imaging quality)
    • Accoustic Isolation Shield (Optional, for better imaging quality)
    • Shock-proof Suitcase (for carrying and traport)